APME807
Thin Film Physics

 

Course Description

Definition of thin films. Environment and molecular and plasma processes in thin film deposition. Cold and thermal plasma. Requirement for substrate, substrate cleaning. Formation of thin films. Properties of thin films. Mechanical, electrical, thermal, chemical, and optical properties of thin films. Thermal evaporation. Laser ablation, synthesis of nanomaterials. Electrical discharges used in thin film deposition. Practical electric discharge configuration for deposition of thin films, direct current electric discharges, radio-frequency discharges, microwave discharges, electron cyclotron resonance plasma, matching units, floating potential, bias potential, plasma potential, effective bias, self-bias. Physical deposition techniques. Chemical vapor deposition techniques (CVD). Other processing technologies.