Micro and Nano Systems


Course Description

This course mainly focuses on the overall introduction to the miniaturization, fabrication, and applications of micro/nano-electromechanical systems (MEMS/NEMS). The fundamental physics and governing formulas will be introduced, along with the typical phenomenon and principle in micro/nano-scales. Overview of the advanced micro/nano-fabrication technologies, e.g. photolithography, will be introduced to describe the fabrication of advanced micro/nano-devices. Some important phenomena in micro/nano-scales will be discussed including sensing, transduction, resonance, and manipulation, etc. Finally, the State-of-the-art applications of micro/nano-systems for interdisciplinary fields such as biomedical sensing, wearable devices, and lab-on-chip systems will be covered.