Advanced Micro and Nano-systems: from Fundamentals to Applications


Course Description

Overall introduction to miniaturization and microelectromechanical systems (MEMS); Fundamental physics of scaling in micro/nano-worlds; Overview of advanced micro/nano-fabrication materials & technologies & devices; Governing principle of physical phenomenon in micro/nano-scales, e.g. actuation, transduction, resonance, and manipulation, etc.; State-of-the-art applications of micro/nano-systems for interdisciplinary fields.